Anow Microfiltration | Entegris – Advanced Filtration & Fluid Management Solutions

Engineered for Purity & Performance

Anow Microfiltration, a trusted brand under Entegris, specializes in contamination control and fluid management technologies. Our solutions are designed for the most demanding environments in microelectronics, life sciences, and industrial manufacturing.

With decades of expertise, we provide advanced filtration, fluid handling, and gas purification systems that ensure process integrity, yield improvement, and operational efficiency.

50+

Years of Innovation

120+

Global Patents

Industries We Serve

Semiconductor

Ultra-pure chemical and gas delivery systems

Life Sciences

Bioprocessing and single-use fluid systems

Microelectronics

Precision etch, clean, and deposition

Data Storage

HDD media substrate cleaning solutions

Solar

High-purity materials for photovoltaics

Chemical Manufacturing

Contamination control and fluid handling

LED

Advanced deposition and cleaning

Water Treatment

High-efficiency filtration systems

Our Advanced Product Portfolio

FluoroPure® HDPE Blowmolded Drums

High-purity containers for chemical and bioprocessing applications. Resistant to aggressive solvents and acids.

• Ultra-clean, low leachable design
• Available in multiple sizes
• FDA-compliant materials

PrimeLock® Tube Fittings

Leak-tight, high-integrity fittings for ultra-high purity fluid systems.

• Zero dead-leg design
• ESD-safe options available
• Compatible with PFA, PVDF, and PTFE tubing

CR and CH Series Valves

Diaphragm valves for aggressive chemical handling in semiconductor and industrial processes.

• Full port design for low pressure drop
• High cycle life
• Available in 316L SS and Alloy-22

In-Line PTFE Gas Filters

Sub-micron particulate removal for high-purity gas lines.

• 0.003 µm absolute rating
• Chemically inert PTFE housing
• Low outgassing and extractables

NOWPak® Liner Based Systems

Single-use fluid handling solutions for biopharma and chemical transfer.

• Pre-sterilized, ready-to-use
• Eliminates cleaning validation
• Scalable from R&D to production

PlanarClean® Cleaning Solutions

Advanced CMP post-clean chemistries for semiconductor wafer processing.

• Residue-free surface cleaning
• Low defectivity
• Compatible with copper and low-k dielectrics

TitanKlean® Cleaning Solutions

High-performance cleaning for titanium and refractory metal residues.

• Effective on stubborn etch residues
• Low corrosion to underlying layers
• Optimized for high aspect ratio features

EP PFA Valves

Electropolished PFA diaphragm valves for the most aggressive chemical environments.

• Full PFA wetted surfaces
• High temperature resistance
• Zero metal ion contamination

Why Choose Anow Microfiltration?

Ultra-High Purity

Engineered to minimize extractables, leachables, and particle generation in critical processes.

Proven Reliability

Trusted by leading semiconductor and life sciences manufacturers worldwide for decades.

Global Support

Local technical expertise and service centers across North America, Europe, and Asia.

Frequently Asked Questions

What industries does Anow Microfiltration serve?

Anow Microfiltration supports semiconductor, life sciences, microelectronics, data storage, solar, LED, chemical manufacturing, and industrial applications requiring high-purity fluid and gas handling.

Are your products compatible with aggressive chemicals?

Yes. Our products are engineered with materials like PFA, PVDF, EP-316L, and Alloy-22 to withstand harsh acids, solvents, and bases used in advanced manufacturing.

Do you offer custom solutions?

Yes. We provide custom dip tubes, fittings, fluid systems, and packaging solutions tailored to your process requirements.

Where can I find technical specifications?

Technical data sheets, MSDS, and product catalogs are available through the official Entegris website or by contacting our technical support team.

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Precision Filtration for Critical Industries