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Advanced CVD & PECVD Systems

High-precision vacuum deposition equipment, quartz components, and integrated systems for research and industrial applications.

About Zhengzhou CY Scientific Instrument

A leading provider of advanced materials processing equipment for scientific research and industrial innovation.

Founded in 2013 by a team of professional engineers, Zhengzhou CY Scientific Instrument Co., Ltd. is a high-tech enterprise registered in Zhengzhou, Henan Province, China. We specialize in the design, development, and manufacturing of advanced equipment for chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), vacuum systems, and high-temperature furnace solutions.

Our products are widely used in universities, research institutes, and high-tech enterprises for materials science, semiconductor research, nanotechnology, and renewable energy development. With a strong focus on innovation, quality, and customer support, we have established a global presence, serving clients across Asia, Europe, and North America.

CY Scientific Instrument participated in the 2019 Autumn Academic Conference of the Chinese Physical Society and has hosted international clients, including Turkish engineers testing hot isostatic pressing furnaces at our facility.

Core Expertise

  • CVD & PECVD Systems
  • Vacuum & Gas Supply Systems
  • High-Temperature Quartz & Ceramic Components
  • Precision Temperature & Flow Control
  • Custom Engineering Solutions

Our Product Range

Comprehensive solutions for thin-film deposition, vacuum processing, and high-temperature material synthesis.

TUBE CVD

High-temperature tube furnaces for chemical vapor deposition with precise temperature control and vacuum compatibility.

TUBE PECVD

Plasma-enhanced CVD systems with RF power supply for low-temperature thin-film deposition of SiOx, SiNx, and graphene.

Tablet PECVD

Compact tabletop PECVD systems ideal for R&D labs, featuring 4-inch flat plate electrodes and easy operation.

ALD System

Atomic Layer Deposition systems for ultra-thin, conformal coatings with atomic-level precision and excellent uniformity.

Vacuum System

Complete vacuum solutions including pumps, gauges, flanges, and leak detectors for high and ultra-high vacuum applications.

Gas Supply System

Precision gas delivery systems with mass flow controllers, bubblers, and safety interlocks for multi-gas processes.

Quartz Tube

High-purity fused quartz tubes for CVD, PECVD, and high-temperature applications up to 1600°C.

Vacuum Flange

Standard and custom vacuum flanges (KF, ISO, CF) for reliable, leak-tight connections in vacuum systems.

RF Power Supply

Stable RF generators (13.56 MHz) for plasma generation in PECVD and sputtering systems.

Corundum Tube

Alumina (Al₂O₃) ceramic tubes for extreme temperature and corrosive environments.

310S Tube

High-temperature stainless steel tubes with excellent oxidation resistance for furnace components.

Mass Flowmeter

Digital mass flow controllers for accurate gas dosing in CVD, PECVD, and ALD processes.

Why Choose CYKY?

High Reliability

Our systems are built with industrial-grade components and undergo rigorous testing to ensure long-term performance.

Precision Engineering

From temperature control to gas flow, every parameter is optimized for reproducible, high-quality thin-film deposition.

Global Support

We support researchers and engineers worldwide with technical documentation, training, and responsive service.

2013
Founded
100+
Products
30+
Countries
10K+
Research Hours

Latest News

Zhengzhou CY Scientific Instrument at 2019 CPS Fall Meeting

Sep. 29, 2019

On September 20–22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. participated in the 2019 Chinese Physics Society Fall Conference hosted by Zhengzhou University, showcasing our latest CVD and PECVD technologies.

Turkish Clients Test Hot Isostatic Pressing Furnace

May 10, 2019

Turkish engineers visited our facility to conduct performance testing on a hot isostatic pressing furnace, highlighting our international collaboration and technical excellence.

Staff Management Training Conducted

Apr. 29, 2019

In April 2019, our company conducted professional management training with Mr. Dou, a renowned marketing and career development consultant, to enhance team performance and service quality.

Get in Touch

For product inquiries, technical support, or collaboration opportunities, visit our official website to contact us directly.

Email: cysi@cysi.wang

Tel: +86 371 5519 9322

Fax: +86 371 8603 6875

Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China

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